Applications
Etch,
Components:
Shower heads
Windows
Focus Rings
Domes
Shields
Nozzles
Etch,
Components:
Shower heads
Windows
Focus Rings
Domes
Shields
Nozzles
Applications
CVD, PVD, ECP
Components:
Gas distribution plates
Chamber liners
Domes
Plating insulators
Cover rings
CVD, PVD, ECP
Components:
Gas distribution plates
Chamber liners
Domes
Plating insulators
Cover rings
Applications
High-Temperature – RTP, EPI
Components:
Edge rings
Shields
Low-Mass lift pins
Thermal couple sheaths
Susceptors
High-Temperature – RTP, EPI
Components:
Edge rings
Shields
Low-Mass lift pins
Thermal couple sheaths
Susceptors
Applications
Implant
Components:
RF shields
Insulators
Implant
Components:
RF shields
Insulators
Applications
General Applications
Components:
ESD end effectors
Lift pins
Wafer chucks
General Applications
Components:
ESD end effectors
Lift pins
Wafer chucks